Coherent Fourier scatterometry for particle detection on structured surfaces
نویسندگان
چکیده
We demonstrate the detection of particles/contamination present on a structured surface using Coherent Fourier scatterometry (CFS) by applying filtering to scanned maps, which eliminates background effects due electronic noise as well structure itself. show that filters in space we can significantly improve capabilities particles structure.
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ژورنال
عنوان ژورنال: Epj Web of Conferences
سال: 2022
ISSN: ['2101-6275', '2100-014X']
DOI: https://doi.org/10.1051/epjconf/202226610014